Z軸不鏽鋼手動平移台

Z Axis Stainless Steel Extended Contact Translation Stages

Z axis Stainless Steel Linear Stages suitable for hard vacuum and clean room applications.

Key Advantages

  • Same Design & Performance as TSD Stages
  • All-Stainless-Steel Construction
  • Excellent Corrosion Resistance
  • High-Grade Vacuum Grease (YVAC2)
  • Suitable for Cleanroom & Vacuum Applications
  • Low Outgassing for Airtight Environments
  • High Reliability & Durability

Product Specifications

產品規格

Part

Number

TSDS-
253
TSDS-
403(UU)
TSDS-
603
TSDS-
653-M6(UU)
Stage Size

[mm]

 25×25 40×40  60×60 65×65
Travel [mm]  ±3  ±3  ±5  ±5
Lead of Actuator

[mm/rotation]

0.5
Micrometer Readable

Resolution [mm]

0.01
Guide Method Extended contact ball bearing guide
Load Capacity [N] 29.4 (3.0kgf) 88.3 (9.0kgf) 147 (15.0kgf)  147 (15.0kgf)
Parallelism [μm] 80 80 80 80
Running Parallelism [μm] 15 20 25 25
Weight [kg] 0.1  0.25 1 1.1