Vacuum Compatible Miniature Motorized Stages

真空用小型電動平移台

A compact motorized stage designed for high-vacuum applications, ideal for installation in vacuum chambers and space-limited equipment.

Key Advantages

Product Specifications

產品規格

Part Number	VTAMM60S‐20X	VTAMM60S‐20XY	VTAMM60S‐20Z
Travel [mm]	20	20	20
Stage Size [mm]	60×60	60×60	60×60
Positioning Slide	Crossed roller
Stage Material	Aluminum
Weight [kg]	0.6	1.2	0.65
Resolution (Full)[μm/pulse]	1	1	1
Resolution (Half)[μm/pulse]	0.5	0.5	0.5
MAX Speed[mm/sec]	5	5	–
Positional Repeatability[μm]	6	6	6
Load Capacity[N]	29.4 (3.0kgf)	19.6 (2.0kgf)	14.7 (1.5kgf)
Lost Motion[μ]	5	5	5