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Vacuum Compatible Motorized Rotation Stage

Motorized SGSP-YAW rotation stages modified for use in high vacuum.

Key Advantages

  • The φ60mm size is best suited for use in smaller chambers.
  • The φ120mm size has a high load capacity due the larger bearing and larger motor.

Product Specifications

產品規格

Part Number VSGSP-60YAW VSGSP-120YAW
Rotation Range In the CW or CCW direction to ∞ Counterclockwise CCW direction to ∞, Clockwise CW
direction stops at near 0 degree (−2.5°)
Stage Size [mm] φ60 φ120
Feed Screw Worm and worm wheel Worm and worm wheel
Positioning Slide Bearing Crossed roller
Stage Material Aluminum Aluminum / Stainless steel
Weight [kg] 0.45 1.7
Resolution (Full)[μm/pulse] 0.6 1.2
Weight [kg] 0.6 1.2
Resolution (Full)[ ° ] 0.005 0.005
Resolution (Half)[ ° ] 0.0025 0.0025
MAX Speed [°/sec] 20 20
Positional Repeatability [ ° ] 0.02 0.02
Load Capacity[N] 29.4 (3.0kgf) 98.0(10.0kgf)
Lost Motion[ ° ]] 0.05 0.05