真空用電動平移台
Vacuum Compatible Motorized Stages
Motorized SGSP stages modified for use in high vacuum.
Key Advantages
- Travel Range: 35–200 mm
- Compact Footprint: Similar to the SGSP series
Product Specifications
產品規格
| Part Number | VSGSP20-35(X) | VSGSP20-85(X) | VSGSP26-200(X | |
|---|---|---|---|---|
| Travel [mm] | 35 | 85 | 200 | |
| Stage Size [mm] | 60×60 | 60×60 | 80×80 | |
| Positioning Slide | Outer rail structure | |||
| Stage Material | Aluminum / Stainless steel | |||
| Weight [kg] | 1 | 1.1 | 2.5 | |
| Resolution (Full)[μm/pulse] | 2 | 2 | 4 | |
| Resolution (Half)[μm/pulse] | 1 | 1 | 2 | |
| MAX Speed[mm/sec] | 10 | 10 | 10 | |
| Positional Repeatability[μm] | 5 | 5 | 10 | |
| Load Capacity[N] | 39.2 (4.0kgf) | 39.2 (4.0kgf) | 58.8 (6.0kgf) | |
| Lost Motion[μ] | 3 | 3 | 10 | |
